Abstract: Microrobotic systems are emerging as transformative technology for minimally invasive medicine, driven by innovationsin actuation mechanisms, advanced fabrication paradigms, and multifunctional system integration. This comprehensivereview analyzes the evolution of microrobotic technologies through three critical dimensions: (1) actuation modalities,including magnetic, optical, acoustic, chemical, and biological actuation, with a focus on the synergistic advantagesof hybrid actuation strategies in complex internal physiological environments; (2) Fabrication methods cover technologies such as photolithography, microinjection molding, self-assembly, and 3D printing, emphasizing innovative strategiesinvolving multi-technology integration and collaborative manufacturing of bio/non-bio hybrid materials; (3) Internal physiological applications involve disease diagnosis, targeted drug delivery, minimally invasive surgery, tissue engineering, andcell manipulation, highlighting the broad prospects of microrobots in precision medicine. Despite remarkable progress,critical challenges remain, including low actuation efficiency, as seen in acoustic systems, limited biocompatibility, exemplified by the toxicity of hydrogen peroxide in chemical actuation, delayed clinical translation, and other related challengesthat must be addressed to advance the field.

Key words: Microrobots, Actuation modalities, Fabrication techniques, Medical robots, Targeted drug delivery, Minimally invasive surgery')">Microrobots, Actuation modalities, Fabrication techniques, Medical robots, Targeted drug delivery, Minimally invasive surgery