1 Department of Mechanics, School of Mechanical and Aerospace Engineering, Jilin University, Changchun 130022, China
2 Key Laboratory of Engineering Bionics, Ministry of Education, Jilin University, Changchun 130022, China
3 Key Laboratory for Cross-Scale Micro and Nano Manufacturing, Ministry of Education, Changchun University of Science and Technology, Changchun 130000, China
4 Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130022, China
5 Archives, Jilin Construction University, Changchun 130000, China