Abstract: This paper reviews the recent progress on bionic microelectromechanical systems (MEMS) used for touching and hearing sensations, focusing on the following three types of devices: MEMS tactile sensors, MEMS directional microphones, and MEMS vector hydrophones. After reviewing the electromechanical coupling principles, design, and performance of these MEMS devices, the authors conclude that it is vital for future research efforts in bionic MEMS to focus more on microfabrication technologies. The development of robust microfabrication flows is the basis to implement hybrid electromechanical coupling principles based on novel functional materials. High-quality polymeric micromachining technologies can also significantly enhance the potential of existing bionic MEMS designs for more practical applications.

Key words: Bionic MEMS, Tactile sensor, Directional microphone, Vector hydrophone, Polymeric micromachining, PDMS, SU-8