Abstract: This paper presents a literature review exploring the potential of piezoelectric field-effect transistors (piezo-FETs) as bionic microelectromechanical systems (MEMS). First, piezo-FETs are introduced as bionic counterparts to natural mechanoreceptors, highlighting their classic configuration and working principles. Then, this paper summarizes the existing research on piezo-FETs as sensors for pressure, inertial, and acoustic sensors. Material selections, design characteristics, and key performance metrics are reviewed to demonstrate the advantage of piezo-FETs over traditional piezoelectric sensors. After identifying the limitations in these existing studies, this paper proposes using bionic piezoelectric coupling structures in piezo-FETs to further enhance the sensing capabilities of these artificial mechanoreceptors. Experimentally validated manufacturing methods for the newly proposed piezo-FET structures are also reviewed, pointing out a novel, feasible, and impactful research direction on these bionic piezoelectric MEMS sensors.

Key words: Bionic MEMS · Piezoelectric field-effect transistors · Tactile sensor · Multi-axis accelerometer · Directional microphone