Journal of Bionic Engineering ›› 2024, Vol. 21 ›› Issue (6): 2717-2729.doi: 10.1007/s42235-024-00602-7
Piezoelectric Field Effect Transistors (Piezo-FETs) for Bionic MEMS Sensors: A Literature Review
Chang Ge1 · Huawei Chen2
- 1. The Department of Electrical and Computer Engineering, The University of British Columbia, Vancouver, BC V6T 1Z4, Canada 2. School of Mechanical Engineering and Automation, Beihang University, Beijing 100191, China
Piezoelectric Field Effect Transistors (Piezo-FETs) for Bionic MEMS Sensors: A Literature Review
Chang Ge1 · Huawei Chen2
- 1. The Department of Electrical and Computer Engineering, The University of British Columbia, Vancouver, BC V6T 1Z4, Canada 2. School of Mechanical Engineering and Automation, Beihang University, Beijing 100191, China
摘要： This paper presents a literature review exploring the potential of piezoelectric field-effect transistors (piezo-FETs) as bionic microelectromechanical systems (MEMS). First, piezo-FETs are introduced as bionic counterparts to natural mechanoreceptors, highlighting their classic configuration and working principles. Then, this paper summarizes the existing research on piezo-FETs as sensors for pressure, inertial, and acoustic sensors. Material selections, design characteristics, and key performance metrics are reviewed to demonstrate the advantage of piezo-FETs over traditional piezoelectric sensors. After identifying the limitations in these existing studies, this paper proposes using bionic piezoelectric coupling structures in piezo-FETs to further enhance the sensing capabilities of these artificial mechanoreceptors. Experimentally validated manufacturing methods for the newly proposed piezo-FET structures are also reviewed, pointing out a novel, feasible, and impactful research direction on these bionic piezoelectric MEMS sensors.