Journal of Bionic Engineering ›› 2022, Vol. 19 ›› Issue (5): 1439-1448.doi: 10.1007/s42235-022-00219-8
High-performance Multilayer Flexible Piezoresistive Pressure Sensor with Bionic Hierarchical and Anisotropic Structure
Meng Wang1,2, Yue Yu3, Yunhong Liang1, Zhiwu Han1, Chunbao Liu4, Suqian Ma1, Zhaohua Lin4, Lei Ren1
- 1 The Key Laboratory of Bionic Engineering, Ministry of Education, Jilin University, Changchun 130025, China 2 Center of Reproductive Medicine, Center of Prenatal Diagnosis, The First Hospital of Jilin University, Changchun 130021, China 3 Department of Endocrinology and Metabolism, China-Japan Union Hospital of Jilin University, Changchun 130033, China 4 School of Mechanical and Aerospace Engineering, Jilin University, Changchun 130025, China
High-performance Multilayer Flexible Piezoresistive Pressure Sensor with Bionic Hierarchical and Anisotropic Structure
Meng Wang1,2, Yue Yu3, Yunhong Liang1, Zhiwu Han1, Chunbao Liu4, Suqian Ma1, Zhaohua Lin4, Lei Ren1#br#
- 1 The Key Laboratory of Bionic Engineering, Ministry of Education, Jilin University, Changchun 130025, China 2 Center of Reproductive Medicine, Center of Prenatal Diagnosis, The First Hospital of Jilin University, Changchun 130021, China 3 Department of Endocrinology and Metabolism, China-Japan Union Hospital of Jilin University, Changchun 130033, China 4 School of Mechanical and Aerospace Engineering, Jilin University, Changchun 130025, China
摘要： Flexible pressure sensor that enables detection of multimodal signals has greater advantages in human–computer interaction, medical/health care, and other applications. To make a versatile flexible pressure sensor, hierarchical and anisotropy structure are key features to improve sensing performance and realize multi-signal detection. However, traditional flexible sensors usually have narrow linear range and single signal detection capability. Herein, a highly sensitive flexible piezoresistive pressure sensor which has broad linear range of pressure is developed by replicating one dimensional microstructures from reed leaf and using multilayer superposition of micropatterned polydimethylsiloxane (m-PDMS). Through superposing 4 layers of parallel micropatterned constructive substrates, the multilayer piezoresistive pressure sensor exhibits a high sensitivity of 2.54 kPa?1, a fast response time of 30 ms, and a broad linear range of 107 kPa. The flexible piezoresistive pressure sensor is also highly robust: there is no fatigue after testing for at least 1000 cycles. Due to the specific anisotropy of the micro-structure, the sensor can measure the tangential force in different directions. It permits multimode signal detection, including pressure, tangential force, and deformation. The versatile flexible pressure sensor enables effective monitoring of multisignals, it reveals great potential for medical and health care, flexible human–computer interaction, and intelligent robot.